Microelectronics Research Center - UT Austin

ies of hot electron transport in small geometry devices and the physics of scaled devices
> Device processing including diffusion, lithography, rapid thermal processing, plasma etching, remote plasma, and thermal chemical v***r deposition of silicon and related film
> Advanced crystal growth of compound semiconductor materials, including III-V multiple heterojunction structures, employing MBE and MOCVD
> New device structures for optoelectronic and photonic applications, and for microwave and millimeter-wave devices
> New approaches to device packaging and interconnects, including optical interconnects.